Hitachi Kokusai MIRAI G3
Introduction to Hitachi Kokusai MIRAI G3
The Hitachi Kokusai MIRAI G3 is a state-of-the-art semiconductor manufacturing tool that has been designed to cater to the complex needs of the semiconductor industry. This device is engineered to provide superior performance, precision, and reliability, making it an ideal solution for manufacturers seeking to optimize their production workflows. With its advanced features and robust architecture, the MIRAI G3 is poised to play a critical role in shaping the future of semiconductor manufacturing.Architecture and Performance Nodes
The MIRAI G3 boasts a robust architecture that allows for seamless integration with various fabrication processes. This device is designed to provide superior performance, precision, and reliability, making it an ideal solution for manufacturers seeking to optimize their production workflows. The MIRAI G3's performance nodes are engineered to deliver high-end semiconductor products, with a focus on advanced features and capabilities that cater to the ever-evolving needs of the semiconductor industry.Technical Specifications
The following table provides an overview of the MIRAI G3's technical specifications:Benchmarks and Performance
The MIRAI G3 has been designed to deliver high-end semiconductor products, with a focus on advanced features and capabilities that cater to the ever-evolving needs of the semiconductor industry. This device has undergone rigorous testing and has demonstrated superior performance, precision, and reliability. The MIRAI G3's benchmarks and performance metrics are a testament to its position as a leading semiconductor manufacturing tool.
What is the substrate size of the MIRAI G3?
The substrate size of the MIRAI G3 is 300mm.
What is the deposition rate of the MIRAI G3?The deposition rate of the MIRAI G3 is 10-100nm/s.
What is the temperature control range of the MIRAI G3?The temperature control range of the MIRAI G3 is -150°C to 500°C.
What is the gas flow control accuracy of the MIRAI G3?The gas flow control accuracy of the MIRAI G3 is 1%.
What is the power supply of the MIRAI G3?The power supply of the MIRAI G3 is 3-phase, 400V, 50Hz.
Specifications
| Parameter | Value |
|---|---|
| Substrate Size | 300mm |
| Layer Thickness | 10-1000nm |
| Deposition Rate | 10-100nm/s |
| Vacuum Chamber Pressure | 10^-9 Torr |
| Temperature Control Range | -150°C to 500°C |
| Gas Flow Control | Mass flow control with 1% accuracy |
| Power Supply | 3-phase, 400V, 50Hz |
| Cooling System | Chilled water or air-cooled |