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Introduction to the Lithius Pro100
The Lithius Pro100 is a member of the CLEAN TRACK LITHIUS series, a family of coater/developer systems designed for advanced semiconductor manufacturing processes. This system is equipped with high-technology features, including advanced packaging, high viscosity, and spin-on hard mask applications. The Lithius Pro100 is designed to provide optimized hardware and processes to support high-performance applications, making it an ideal solution for semiconductor manufacturers seeking to improve their production efficiency and reduce costs.System Architecture
The Lithius Pro100's architecture is built upon the CLEAN TRACK ACT series, with a focus on extensibility, high throughput, and reduced footprint. The system's design allows for easy integration with existing production lines, making it an ideal solution for manufacturers seeking to upgrade their existing infrastructure. The Lithius Pro100's advanced features include: - High-precision coating and developing capabilities - Advanced packaging support - High viscosity and spin-on hard mask applications - Improved OEE and reduced cost of ownership (CoO)Performance and Benchmarks
The Lithius Pro100's performance and benchmarks are designed to meet the demands of advanced semiconductor manufacturing processes. The system's high-throughput and reduced footprint make it an ideal solution for high-volume production applications. The Lithius Pro100's benchmarks include: - High-precision coating and developing capabilities, with a coating uniformity of ±1% and a developing uniformity of ±2% - Advanced packaging support, with a maximum package size of 300mm x 300mm - High viscosity and spin-on hard mask applications, with a maximum viscosity of 100 cP and a maximum spin speed of 4000 rpm
What is the Lithius Pro100's coating uniformity?
The Lithius Pro100's coating uniformity is ±1%.
What is the maximum package size supported by the Lithius Pro100?The maximum package size supported by the Lithius Pro100 is 300mm x 300mm.
What is the maximum viscosity supported by the Lithius Pro100?The maximum viscosity supported by the Lithius Pro100 is 100 cP.
What is the Lithius Pro100's OEE?The Lithius Pro100's OEE is 95%.
What is the CoO reduction provided by the Lithius Pro100?The CoO reduction provided by the Lithius Pro100 is 20%.
Specifications
| Specification | Value |
|---|---|
| Coating Uniformity | ±1% |
| Developing Uniformity | ±2% |
| Maximum Package Size | 300mm x 300mm |
| Maximum Viscosity | 100 cP |
| Maximum Spin Speed | 4000 rpm |
| OEE | 95% |
| CoO Reduction | 20% |
| Footprint Reduction | 30% |