Veeco Instruments Nexus IBE
Introduction to Ion Beam Etch Technology
Ion beam etch (IBE) technology is a highly precise and controlled method of material removal, used in the fabrication of semiconductor devices and other advanced materials. The Veeco Instruments Nexus IBE is a state-of-the-art system that utilizes IBE technology to achieve high-quality etching results.
Key Components and Architecture
The Veeco Instruments Nexus IBE features a range of key components, including:
- 350mm diameter Argon ion source with RF plasma generator, 1.8MHz, 2kW maximum
- Three-grids system with molybdenum electrostatic apertures for extracting and accelerating ions
- Plasma Bridge Neutralizer (PBN) for neutralizing the charged ion beam
- Substrate fixture with rotating speed and tilt angle adjustments for accurate control
System Specifications
Performance and Applications
The Veeco Instruments Nexus IBE is designed for high-performance applications in semiconductor and advanced material processing. The system's high uniformity and precise control over the etching process make it ideal for a range of applications, including:
- ABS step and cavity processing
- Dielectric film deposition
- Metallization and interconnect formation
The PBN is used to neutralize the charged ion beam, preventing it from interacting with the substrate and ensuring a high-quality etching process.
What is the maximum rotation speed of the substrate fixture in the Veeco Instruments Nexus IBE?The maximum rotation speed of the substrate fixture is up to 10rpm.
What is the tilt angle adjustment range of the substrate fixture in the Veeco Instruments Nexus IBE?The tilt angle adjustment range of the substrate fixture is +90° to -70°.
Specifications
| Parameter | Value |
|---|---|
| Ion Source Diameter | 350mm |
| RF Plasma Generator Frequency | 1.8MHz |
| RF Plasma Generator Power | 2kW maximum |
| Number of Grids | 3 |
| Grid Material | Molybdenum |
| Plasma Bridge Neutralizer | Yes |
| Substrate Fixture Rotation Speed | Up to 10rpm |
| Substrate Fixture Tilt Angle Adjustment | +90° to -70° |